Modeling and Simulation of Semiconductor Processing Reactors


Presentation made by U. Kelkar at the NAFEMS Americas Conference 'New Frontiers in Product Modeling and Simulation' that was held in Seattle, Washington on 7-9 June 2016.

Document Details

Reference

C_Jun_16_USA_62

Authors

Kelkar. U

Language

English

Type

Presentation

Date

2016-06-07

Organisations

Applied Materials

Region

Americas

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